Core contributor to SeNaTe (7nm technology) and TAPES3 (3nm semiconductor pilotline), providing manufacturing equipment and process know-how.
SUSS MICROTEC SOLUTIONS GMBH & CO KG
German SME manufacturing precision lithography and bonding equipment for semiconductor and graphene device fabrication at nanometer scale.
Their core work
SUSS MicroTec is a German SME that designs and manufactures precision equipment for semiconductor manufacturing — specifically lithography, wafer bonding, and photomask processing tools. Within H2020 projects, they contribute process equipment and materials expertise to advanced semiconductor and 2D materials pilot lines. Their role is enabling partners to fabricate devices at the nanometer scale by supplying and adapting the specialized tools needed for next-generation chip and graphene-based manufacturing. They sit at the intersection of equipment manufacturing and semiconductor R&D, making them a critical enabler for anyone moving lab-scale processes toward industrial production.
What they specialise in
Participated in both GrapheneCore3 (Graphene Flagship) and 2D-EPL (2D Experimental Pilot Line), adapting equipment for graphene device fabrication.
Involved in TAPES3 and 2D-EPL, both focused on moving from lab research to pilot-scale manufacturing of advanced semiconductor and 2D material devices.
Across all four projects, their contribution centers on precision lithography and wafer-level processing tools essential for sub-10nm and 2D material fabrication.
How they've shifted over time
In the early phase (2015–2018), SUSS MicroTec focused squarely on traditional silicon semiconductor scaling — contributing equipment expertise to projects pushing toward 7nm and 3nm node technologies. From 2020 onward, their focus shifted decisively toward graphene and 2D materials, joining both the Graphene Flagship Core Project and its dedicated Experimental Pilot Line. This evolution mirrors the broader industry trend: as silicon scaling reaches physical limits, equipment makers must adapt their tools for post-silicon materials like graphene.
SUSS MicroTec is repositioning from pure silicon semiconductor equipment toward graphene and 2D material fabrication tools — expect them to seek partnerships in post-silicon device manufacturing and integration.
How they like to work
SUSS MicroTec always participates as a partner, never as coordinator — consistent with their role as a specialized equipment supplier embedded in larger consortia. With 257 unique partners across 24 countries from just 4 projects, they operate in very large, flagship-scale consortia (the Graphene Flagship alone involves 150+ partners). This means they are experienced at working within complex multi-partner structures and integrating their tools into diverse research workflows.
Despite only four projects, SUSS MicroTec has collaborated with 257 unique partners across 24 countries — a remarkably wide network driven by participation in large flagship initiatives. Their reach spans most of the EU, with particularly strong connections to major semiconductor and materials research hubs in Western Europe.
What sets them apart
SUSS MicroTec occupies a rare position as an SME that manufactures the actual physical tools used to fabricate semiconductor and 2D material devices at the nanometer scale. Unlike research labs that develop processes or large fabs that produce chips, they supply the precision equipment that makes fabrication possible. For consortium builders, they bring immediate industrial capability — real hardware, not just research — which is essential for any project aiming to move beyond proof-of-concept toward a functioning pilot line.
Highlights from their portfolio
- 2D-EPLTheir largest funded project (EUR 1.52M) and a strategic move into the Graphene Flagship's pilot line — signaling a serious commitment to 2D materials manufacturing.
- SeNaTeTheir earliest H2020 project, focused on 7nm semiconductor technology — establishing their credentials in advanced node fabrication equipment.