SciTransfer
Organization

LAM RESEARCH BELGIUM

European arm of global semiconductor equipment leader, providing etch and deposition process tools for advanced chip manufacturing from 7nm to 2nm nodes.

Large industrial companydigitalBENo active H2020 projects
H2020 projects
7
As coordinator
0
Total EC funding
€485K
Unique partners
100
What they do

Their core work

Lam Research Belgium is the European arm of Lam Research Corporation, a global leader in semiconductor wafer fabrication equipment. Based in Leuven — at the heart of Europe's semiconductor R&D ecosystem near IMEC — they provide advanced process equipment for etching, deposition, and cleaning used in manufacturing chips at the most advanced technology nodes. Their H2020 involvement tracks the entire roadmap from 7nm down to 2nm, supplying and co-developing the equipment and process know-how needed to push Moore's Law forward.

Core expertise

What they specialise in

Semiconductor process equipment (etch, deposition, clean)primary
7 projects

All seven H2020 projects center on semiconductor process and equipment for advanced nodes, from SeNaTe (7nm) through IT2 (2nm).

Advanced node integration (sub-7nm technology)primary
5 projects

TAKE5, TAKEMI5, TAPES3, PIN3S, and IT2 systematically address 5nm, 3nm, and 2nm node challenges.

Metrology for 3D semiconductor structuressecondary
2 projects

METRO4-3D focused specifically on 3D metrology techniques including TOFSIMS, Micro-Hall, and GHz scanning acoustic microscopy; metrology also appears in IT2.

Lithography and patterningsecondary
2 projects

Lithography is a keyword in IT2, and patterning is inherently linked to the etch equipment Lam provides across multiple projects.

Heterogeneous integration and photonics packagingemerging
1 project

IT2 (2nm node) lists heterogeneous integration and photonics as keywords, signaling expansion beyond traditional CMOS scaling.

Evolution & trajectory

How they've shifted over time

Early focus
3D metrology and 7nm process
Recent focus
Sub-3nm semiconductor equipment

In their early H2020 phase (2015–2017), Lam Research Belgium focused on specialized metrology — 3D measurement techniques like TOFSIMS, Micro-Hall probes, and GHz scanning acoustic microscopy — alongside initial 7nm process work. From 2018 onward, their involvement broadened significantly to encompass full semiconductor process equipment and materials for progressively smaller nodes (3nm, 2nm), with their latest project IT2 adding heterogeneous integration, photonics, and design-technology co-optimization (DTCO/STCO) to the mix. The trajectory mirrors the industry's shift from pure dimensional scaling toward system-level integration approaches.

Moving toward 2nm and beyond-CMOS technologies including heterogeneous integration, making them a key equipment partner for Europe's next-generation chip manufacturing ambitions.

Collaboration profile

How they like to work

Role: third_party_expertReach: European15 countries collaborated

Lam Research Belgium never coordinates — they join as a participant or third party, consistent with their role as an equipment supplier contributing specialized capabilities to large pilot-line consortia. Their projects are large ECSEL/IA initiatives with 100 unique partners across 15 countries, meaning they operate in the biggest European semiconductor consortia. Their shift from direct participant to third-party status in later projects suggests they contribute equipment and process expertise on-demand rather than driving project agendas.

Connected to 100 unique partners across 15 countries through large ECSEL semiconductor consortia, placing them at the center of Europe's chip manufacturing R&D network centered on the Leuven/IMEC ecosystem.

Why partner with them

What sets them apart

As a subsidiary of one of the world's top three semiconductor equipment makers, Lam Research Belgium brings industrial-scale process equipment expertise that few European partners can match. Their Leuven location provides direct integration with IMEC's pilot lines, making them a bridge between global equipment capabilities and Europe's advanced semiconductor R&D. For consortium builders, they offer credibility and equipment access that signals serious manufacturing intent.

Notable projects

Highlights from their portfolio

  • SeNaTe
    Largest EC contribution (EUR 445,140) and Lam's entry point into Europe's advanced node roadmap at 7nm.
  • IT2
    Most ambitious scope — targeting the 2nm node with keywords spanning lithography, metrology, photonics, and heterogeneous integration, representing the frontier of semiconductor manufacturing.
  • METRO4-3D
    Reveals Lam's metrology depth — TOFSIMS, Micro-Hall, and GHz scanning acoustic microscopy are highly specialized characterization techniques not typically associated with an equipment vendor.
Cross-sector capabilities
Photonics and optical systemsAdvanced materials characterizationPrecision manufacturing and nanofabricationSensor technology (from metrology expertise)
Analysis note: Profile is strong due to clear project progression (7nm→2nm) and well-tagged keywords. Confidence not 5 because several projects lack direct EC funding (third-party status) and three projects have no keywords, limiting granular expertise mapping. Lam Research is a well-known global company, so contextual industry knowledge supplements the CORDIS data.